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Etch/Deposition/Plasma Dicing/Thermo Processing

Model: VERSALINE/Navigator/Odyssey/Vision/KOBUS/LAPECVD/T

Category: Compound Semiconductor Equipment

Exhibitor: SCIENTECH CORPORATION

Booth No: N303

Characteristic

Plasma-Therm has been innovating plasma processing technologies since 1974.Plasma-Therm designs and builds easy-to-use wafer processing platforms for standard and advanced processes used in microelectronics manufacturing and R&D applications. All the platforms are the centerpiece of our application solutions and cover a wide variety of process steps including etch, deposition, material modification, and die singulation. In addition, our platforms are configurable to help you get the equipment and features you need.

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