Ｗhite light interferometer＋Scanning Confocal Microscopy

Model: Sensofar Smart2

Category: Compound Semiconductor Equipment

Booth No: M334

Characteristic

1. Obtain micro-nano surface characteristics within five seconds: 3D surface profile, roughness, film thickness and other information
2. The industry’s smallest scanning head is only “90mm” wide and can also be used on production lines
3. The highest CP king: buy a white light interferometer and get conjugate focus micro-measurement function for free
4. Excellent vertical repeatability and resolution
5. Designated and approved by major semiconductor manufacturers

Purpose:
Provides three-dimensional surface morphology images, including surface roughness, particle size, height difference and spacing

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Ｗhite light interferometer＋Scanning Confocal Microscopy

Characteristic

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