Nanoscale Reticle Pod N2 Cabinet

 

Model: BM1238

Category: Semiconductor Package Equipment

Exhibitor: BOSSMEN INC.

Booth No: N003

 

Characteristic

 

Nanoscale Reticle Pod N2 Cabinet by Bossmen

With the advancement of photolithography technology, the patterns on reticles have become increasingly finer, which in turn increases the risk of reticle contamination and yield loss. The coating on the reticle is particularly delicate and prone to damage, and external dust and chemical residues are potential sources of contamination that threaten the quality of the reticle.

In addition to the manufacturing quality of the reticle itself, the way the reticle is stored is also crucial. To ensure long-term stability, reticles are typically stored in clean nitrogen cabinets. The nitrogen helps to remove chemical contaminants from the reticle and maintain an appropriate humidity level.

The Bossmen Nanoscale Reticle Pod N2 Cabinet not only provides a clean and dry storage environment, but also features an energy-saving design, capable of saving more than 80% of nitrogen usage compared to traditional nitrogen cabinets. Furthermore, the cabinet includes a visualized temperature and humidity display function, further enhancing the reliability and precision of the reticle storage process.

Key Features:
1.Reticle Storage and Retrieval Management: Equipped with access control card readers and RFID systems, the reticle storage and retrieval operations are effectively managed to enhance security and accuracy.
2.Independent Nitrogen Flow Monitoring: Each reticle box is independently monitored for nitrogen flow, and data is reported. The system adopts an
environmentally friendly and energy-efficient design that effectively reduces unnecessary nitrogen consumption.
3.Temperature and Humidity Monitoring: The system allows for the setting, recording, alarming, and offset calibration of temperature and humidity, supporting a humidity range adjustment from 5% to 60% RH.
4.Alert Function: When there are anomalies in the placement or retrieval of the reticle box, the system will trigger an alert and record the event to ensure the operation process is correct.
5.Safety Mode: Features include alerts for doors left open for too long, high humidity, and excessive oxygen concentration, providing comprehensive safety protection.
6.Air Intake Startup and Confirmation: When the FFU airflow starts, the XCDA air intake will automatically begin, ensuring that dry air flows into the system.
7.Nitrogen Air Intake Startup and Confirmation: After passing through the nitrogen purifier, nitrogen is layered and distributed into each reticle box. The nitrogen flow is monitored through the exhaust piping to maintain a stable reticle storage environment.
8.Filtration System:
Programmable Filter Fan Unit (FFU): The oxygen concentration setting triggers the startup conditions to precisely control the air filtration and circulation.
Chemical Filter Mesh: Effectively filters harmful gases such as carbonate ions, sulfides, and ammonia from dry air, protecting the reticle from contamination.
ULPA Air Filter: Filters ultra-fine dust particles, achieving Class 1 level cleanliness and providing a dust-free environment.
Nitrogen Purifier: Filters harmful gases from the nitrogen to ensure the storage environment reaches the highest purity level.

 

Other Products

 

• 

  XCDA Humidity Control Unit

• 

  Slim Nitrogen Control Unit(flow meter equipped)

• 

  Mobile Airtight N2 Cabinet

• 

  Ultra Dry Cabinet

• 

  Temperature/Humidity Monitoring Unit

 

 

 

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