Total solution for semiconductor manufacturing

Model: HEIDENHAIN/ ETEL comprehensive product range

Category: Semiconductor Package Equipment

Booth No: L218

Characteristic

ETEL also offers the VULCANO2 motion platform and the active vibration isolation platform QuiET, providing highly integrated motion platform solutions to customers. VULCANO2 is an innovative multi-axis motion system with a gantry stacking design, equipped with the renowned ETEL iron-core motors and high-end optical scales. It is particularly suitable for processes such as wafer front-end and 3D IC process testing, including applications like photolithography stacking measurements, critical dimension 2D & 3D measurements, and thin film measurements. QuiET, on the other hand, effectively eliminates vibrations caused by floor vibrations and the acceleration/deceleration of the motion platform itself, with its feedforward control capable of eliminating up to 99% of vibrations.

Heidenhain/ETEL's products, such as optical scales, motion controllers, motion platforms, and vibration isolation platforms, can be combined to provide complete solutions to customers or supplied individually based on customer needs, offering great flexibility and variety in business models. Additionally, Heidenhain/ETEL emphasizes that its extensive application experience, along with the complete solutions it provides, can shorten development time, enabling customers to quickly bring equipment into mass production. In the past, customers had to integrate components from various suppliers themselves and perform comprehensive testing on prototypes to ensure everything was in order before entering mass production. With Heidenhain/ETEL’s complete solutions, the development process can be effectively streamlined, improving R&D efficiency and facilitating the rapid introduction of equipment to mass production.

These solutions are ideal for semiconductor wafer inspection processes of various sizes and a variety of advanced packaging processes (such as CoWoS, InFO, SoIC). Currently, Heidenhain/ETEL’s presence can be found in many key process equipment used by major international companies.