Nano-positioning stage N2

Category: Semiconductor Smart Auto Solution

Booth No: M420

Characteristic

◼Nano Positioning Stage
Nano-positioning stage was developed by HIWIN
MIKROSYSTEM won the 2023 Taiwan
Excellence-Gold Award. Nano-positioning stage,
with nanoscale stability and pair with software
solutions to improve the overall equipment
accuracy. Perfectly present the highly integrated
capabilities of machine, electricity and software to
provide competitive solutions to meet the
upgrading demands of semiconductor inspection equipment.
Features：
➢ Low profile structure
➢ High geometric accuracy
➢ High velocity stability ± 0.1% @ 100 mm/s
➢ Nano positioning stability ± 2 nm
➢ Possibility of equipping with smart modules, keeping track of machine
statuses
➢ Customized modular design
➢ Integrated electronic control system, providing one stop service

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Nano-positioning stage N2

Characteristic

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