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Semi-automatic Cassette/FOUP cleaner

Model: NFC-H12

Category: Semiconductor Smart Auto Solution

Exhibitor: ASIA NEO TECH INDUSTRIAL CO., LTD.

Booth No: N114

Characteristic

☆Semi-automatic cassette/FOUP cleaning device, easy to operate and high cleaning efficiency, and can handle a variety of cassette/FOUP.
☆It has a quick-change cleaning frame structure, which is convenient for the operator to replace.
☆Various recipes can be set according to the characteristics of each cassette/FOUP, and recipe parameters can be stored.
☆Clean the four outer groups and the inner two groups of nozzles with DI water.
☆High-speed rotation/XCDA air blowing/hot air + IR baking and drying the carrier.
☆UPH 24 pcs/hr

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