Automatic Panel FOUP cleaner
Model: NFC-R510
Category: Semiconductor Smart Auto Solution
Exhibitor: ASIA NEO TECH INDUSTRIAL CO., LTD.
Booth No: N114
Characteristic
☆Rinse with DI water
☆XCDA + high pressure dust-free air knife drying
☆Vacuum drying
☆Manipulator workstation handling
☆DI water heater (option)
☆FOUP layer distance inspection (option)
☆FOUP internal dryness (humidity) inspection (option)
☆SEMI S2/S8 certification
☆UPH 6 pcs/hr
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