Automatic plasma cleaning machine (Nano PCCE)

Model: Nano PCCE

Category: Semiconductor Package Equipment

Booth No: N406

Characteristic

1. Desktop PCCE control type 3.5'' touch screen.
2. Free switching between automatic/manual control mode.
3. In the automatic control mode, more than 50 sets of process programs can be stored,
the process can be displayed in real time, and process parameters such as gas flow, pressure,
plasma cleaning time, and power can be displayed in real time through charts and figures.
4. Manual control mode can be set by tapping directly on the diagram of the corresponding control unit.
5. The data is automatically saved and can be exported through the USB interface.
6. Safety functions: temperature, pressure, door lock interlock function.
7. Set pumping time deviation, gas flow deviation, cavity pressure deviation,
and power output deviation alarm values according to process requirements.
8. Nano plasma systems are mainly used in: semiconductor technology, R&D departments,
microsystem engineering, sensing technology, medical engineering, analysis, archeology,
automobiles, small batch manufacturing, plastic technology, sterilization, textile technology
and other fields.

Brand: Diener/Germany