Priming Station
Model: FPS
Category: Semiconductor Smart Auto Solution
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
◆ Stand-alone Flush and Rinse tool : Individual equipment to avoid occupying process tool time.
◆ Avoid parts cross-contamination : Individual cleaning line for each component to avoid becoming a source of contamination.
◆ Chemical consumption saving : Internal circulation design for chemical liquid recycling.
◆ Comply SEMI S2 / S10 certificate : Fire and liquid leakage detection device."
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