Coater/Developer

 

Model: ATOM 6500C、ATOM 6500D、ATOM 6800C、ATOM 6800D

Category: Compound Semiconductor Equipment

Exhibitor: HERMES-EPITEK CORP.

Booth No: M412

 

Characteristic

 

Providing Customized Solutions

Hermes-Epitek's ATOM series fully automatic coaters/developers are suitable for the processing of wafers of various sizes and square wafers. The equipment mainly consists of a cassette station, alignment, transfer, coating, thermal processing, chemical supply, waste discharge system, and control modules, operated through a graphical user interface. Hermes-Epitek has a high market share in LED, Micro-LED, and semiconductor back-end processes. After years of research, development, and improvement, the ATOM series entered the compound semiconductor market in 2021.

The entire system is independently developed and designed by Hermes-Epitek. It features in-house robotic arms, which provide high speed and easy maintenance, thereby delivering high productivity and uniformity. The system supports remote production management through automated systems, and complies with SEMI S2/S10 certifications. Therefore, it is able to offer diverse and customized solutions for clients across various industries.

Fork 3
The robotic arm is equipped with a unique three-prong fork for exclusively transferring wafers into the coating module. It can prevent heat accumulating in the fork from affecting wafer temperature. This in turn, improves the uniformity of coating thickness. In addition, the self-developed software can quickly provide customized functions according to requirements.

 

Other Products

 

• 

  Compound Semiconductor Etching System

• 

  6-inch/8-inch SiC 4H N-Type/ S.I.-Type Substrate

• 

  Micro Inspection System

• 

  Photo Mask Repair System

• 

  E-Beam Evaporator

• 

  Thermal-Chiller Heater Exchanger

• 

  In-Situ Macro Inspection System

• 

  Temperature and Humidity Controller

• 

  Priming Station

 

 

 

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