Contactless Resistivity Mapping Tool for 300 mm Semi‑insulating Wafers

Model: COREMA-2000/3

Category: Compound Semiconductor Equipment

Booth No: N220

Characteristic

Semilab’s COREMA product line, built on a highly sensitive contactless capacitance‑based technique, is designed to meet the demands of routine production monitoring and quality assurance for semi‑insulating compound semiconductor wafers. The system provides high‑precision resistivity characterization across an exceptionally wide resistivity range, enabling reliable assessment of material uniformity, electrical behavior, and substrate quality without requiring any electrical contacts or surface preparation.
- Semi‑insulating GaAs/InP/SiC: Incoming inspection; post‑epitaxy background and defect indication.
- III–V materials: Within‑wafer/lot‑to‑lot uniformity and drift monitoring.
- RF/opto substrates: Screening for power amplifiers, photodetectors, microwave/mmWave devices.
- Process development & excursion analysis: Quantifying impacts from furnace, anneal, cleaning, and growth parameters.