E-Beam Evaporator
Model: Peva-920EC
Category: Compound Semiconductor Equipment
Exhibitor: HERMES-EPITEK CORP.
Booth No: M412
Characteristic
The electron beam evaporation equipment uses electron beam (E-Beam) irradiation to heat the material in a high vacuum chamber until the material evaporates. It forms a thin film coating from the material on the surface of the wafer.
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