Spreading Resistance Profiling System with Integrated I‑V Measurement Capability

Model: SRP 2100i

Category: Compound Semiconductor Equipment

Booth No: N220

Characteristic

The SRP‑2100i system is a high‑performance Spreading Resistance Profiling (SRP) solution equipped with integrated I‑V measurement capability.
It enables precise structure characterization and profile monitoring of compound semiconductor materials, while also supporting resistivity and carrier density profiling across all silicon semiconductor structures used in modern device fabrication.
By combining advanced SRP methodology with sensitive I‑V characterization, the SRP‑2100i offers comprehensive electrical depth profiling for both R&D and production environments—providing engineers with the detailed subsurface information required for doping evaluation, junction analysis, diffusion studies, and device process optimization.