MicroLED functional inspection system based on photoluminescence imaging
Model: LumiPix 3000
Category: Micro LED Production Manufacturing Equipment
Exhibitor: SEMILAB TAIWAN CO. LTD.
Booth No: N220
Characteristic
LumiPix is a microLED functional testing system. It uses a high-resolution PL imaging inspection metrology to detect intensity and wavelength defects of the microLED devices.
Photoluminescence-based optical inspection for GaN/InGaN or AlInGaP microLED wafers is the main application of the LumiPix system. Individually monitoring intensity and estimating spectral peak position for each microLED. Map of defective LEDs in terms of intensity and spectral peak position can be determined.
Other possible applications:
• Wafer surface examination using a white LED-based optical microscope.
• LED epi (InGaN/GaN MQW epi) wafer inspection.
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