300mm Spectral Photoluminescence system

Model: SPL 3000

Category: Compound Semiconductor Equipment

Booth No: N220

Characteristic

Semilab’s SPL systems seamlessly integrate spectral photoluminescence, spectroscopic reflectometry (SR), and bow/warp measurement into a single, highly stable metrology platform. Designed to accommodate samples up to 300 mm, the system delivers comprehensive, non‑destructive analysis of the optical and electronic properties of advanced semiconductor materials such as GaN HEMT, SiC, and other wide‑bandgap substrates.

This multi‑modal approach enables precise evaluation of material quality, layer thickness, uniformity, strain, and wafer geometry—supporting both R&D and production environments in compound semiconductor and power device manufacturing.

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300mm Spectral Photoluminescence system

Characteristic

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