4-Axis Cylindrical Coordinate Clean Robot

Model: STCR4160SN

Category: Panel-Level Packaging (PLP) Equipment / Material

Booth No: M120

Characteristic

New type of 4-axis cylindrical coordinate type twin-arm clean robot.
For handling wafers from 2 inches to 12 inches with low-cost, high-speed handling, and no step-out error.

1. High reliability: Closed-loop control achieves no step-out error under rapid load change or acceleration.
2. Reduced origin search time: By absolute encoder
3. Equipped with the batteryless multi-rotation absolute sensor
4. Robot replacement is available: Compatible with conventional model (installation/performance)
5. High rigidity: Payload capacity of 3kg (calculated for the arm 3rd joint/including wrist-block, end-effector, and wafer)
6. Arm lineup: 100mm, 130mm, 160mm, 200mm
7. Base or flange mounting type is selectable according to the customer’s system layout.
8. Bernoulli end-effector is available (option)

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4-Axis Cylindrical Coordinate Clean Robot

Characteristic

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